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Vacuum Exhaust Device - List of Manufacturers, Suppliers, Companies and Products

Vacuum Exhaust Device Product List

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Vacuum exhaust device (vacuum pump unit)

Vacuum exhaust device (vacuum pump unit)

Exhaust system unit with proven performance and reliability. Designed to handle applications that are difficult with a single pump. Enhanced reliability with combinations tailored to the purpose and additional peripheral equipment.

A top-class vacuum pump exhaust unit in the industry. Boasting a large number of deliveries over many years. By combining water-sealed vacuum pumps, oil rotary vacuum pumps, dry pumps, and mechanical boosters, we achieve new performance and value. We solve vacuum exhaust issues for a wide range of applications, including chemical processes such as drying, distillation, and degassing, metallurgical applications like degassing, hard film coating equipment, CVD equipment, and general industrial applications such as resin molding!

  • Vacuum Equipment

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Vacuum exhaust device

Vacuum exhaust device

A device suitable for vacuum evacuation of the transformer body.

This device is suitable for vacuum evacuation of the transformer body. It is composed of a vacuum pump, separator, distribution panel, and other components, designed to be structurally robust and easy to operate and move for long-term use. The Sanbi-style vacuum evacuation device mainly comes in three types: SV type, SVP type, and SVM type, but it can also be custom-designed and manufactured according to your usage conditions.

  • Vacuum Equipment
  • Transformers

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Vacuum Exhaust Device "KST-F08VS-RKS Type"

Vacuum Exhaust Device "KST-F08VS-RKS Type"

This is a slim design vacuum exhaust device that can be installed in narrow spaces!

We offer the vacuum exhaust device 'KST-F08VS-RKS type' equipped with a turbo molecular pump and a rotary pump. With a full-range gauge, it allows for monitoring of vacuum levels from atmospheric pressure to high vacuum without switching. Additionally, its slim design with a width of 270 mm makes it suitable for installation in narrow spaces. It is also easy to move. 【Features】 ■ Allows monitoring of vacuum levels from atmospheric pressure to high vacuum without switching ■ Slim design ■ Can be installed in narrow spaces ■ Easy to move *For more details, please download the PDF or feel free to contact us.

  • Ventilation and Exhaust
  • Vacuum Equipment

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Vacuum exhaust system for CVD equipment (chlorine gas compatible vacuum pump unit)

Vacuum exhaust system for CVD equipment (chlorine gas compatible vacuum pump unit)

Proven track record in exhaust for hot CVD equipment. Particularly effective for the exhaust of Cl-based gases, achieving both high-volume exhaust and compatibility with chlorine-based gases. A reliable system that also incorporates gas treatment.

A vacuum pump with a proven track record in chemical processes (water-sealed vacuum pump and mechanical booster) has been integrated into a unit. The pump materials and peripheral equipment are optimized according to the process characteristics, gas types, and exhaust volumes of the CVD equipment. The main exhaust pump is a water-sealed vacuum pump with a liquid circulation system, using an alkaline solution for the circulating sealing liquid, achieving both the exhaust and neutralization of chlorine-based gases. This significantly reduces the load on the downstream gas treatment equipment. It is particularly effective in the exhaust system for chlorine-based gases in thermal CVD equipment for surface treatment, and is widely used in the production of tools, molds, and semiconductor jigs. It can also be applied to the exhaust of chlorine-based gases during Si epitaxial growth and etching. The main pump's water-sealed vacuum pump is also made entirely of stainless steel, providing excellent corrosion resistance in a dedicated vacuum exhaust system.

  • Vacuum Equipment
  • Vacuum pump
  • Other semiconductor manufacturing equipment

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